Gebruiksaanwijzing /service van het product MT-17E-003-D van de fabrikant Seiko Instruments
Ga naar pagina of 124
MT-17E-003-D Seiko Instruments Inc. Dec. 2001 Copyright 2001 Seiko Instruments I nc. All right s reserv ed. Printed in Japan. STP-H600/H1000 Series Turbomolecular Pump INSTRUCT ION MANUAL (Third Edition-d) Read through the Safety Prec autions of this Manual carefully before using the STP pump.
STP-H600/H1000 Ser ies Instruction Manual SAFETY PRECAUTIONS The Safety Precautions in t his Manual const it u te guidelines t o prot ect operat ors, t he STP pump and its peripheral equipment.
STP-H600/H1000 Ser ies Instruction Manual WA RNIN G ◇ Check the properties of the gas to be used, re ferring to the Material Safety Dat a Sheet (MSDS) you obtain from the gas supplier. Follow any and all safety precaut ions and/ or recommendations instructed by the gas supplier.
STP-H600/H1000 Ser ies Instruction Manual C A U TI O N ◇ NEVER use any gas that is not specified as usable in t his M anual. The use of such gas may corrode the STP pump and damage it. ◇ A hazardous liv e v oltage may exist at connect or/ t erminal that marked .
STP-H600/H1000 Ser ies Instruction Manual C A U TI O N ◇ DO NOT put foreign objects int o t he STP pump. Doing so may result in product damage. ◇ NEVER turn OFF t he primary pow er (DO NOT sw it ch the breaker “OFF” ) w h ile t he STP pump is rotating.
STP-H600/H1000 Ser ies Instruction Manual INTRODUCTION Thank you very much for pu rchasing Seiko Instruments’s turbomolecular pump. The turbomolecular pump is designed to be inst alled in the vacuum equipment in to exhaust gases from it.
STP-H600/H1000 Ser ies Instruction Manual PRECAUTIONS 1) No part of this manual may be reproduced in any form by any means without prior written perm ission from Seiko Instrument s. 2) Seiko Instrument s pursues a policy of continuing improvem ent in design and performance of this product.
STP-H600/H1000 Ser ies Instruction Manual LIMITED WARRANTY This WARRANTY applies to t he customer t o whom S eiko Instrument s has delivered this product.
STP-H600/H1000 Ser ies Instruction Manual indication (“W ARNING” message) on the LCD display; 16) Overhaul and replacement of maintenance parts; 4.
STP-H600/H1000 Ser ies Instruction Manual TABLE OF CONTENTS SAFETY PRECAUTION INTRODUCTION LIMIT ED W A RRANTY 1 Precautions for Safe Operation of the STP Pump ..................................... 1-1 1.1 Usable Gases ................................
STP-H600/H1000 Ser ies Instruction Manual 5.5.4 Starting the STP Pu mp af ter Stopping ......................................................... 5- 3 5.5.5 Powering OFF ..................................................................................
STP-H600/H1000 Ser ies Instruction Manual 12 Maintenance and In spection .................................................................... 12-1 12.1 Replacing the Internal Battery ....................................................................
STP-H600/H1000 Ser ies Instruction Manual TABLES Table 3.1 T ightening to rque of bolt ....................................................................................... 3-8 Table 3.2 Max imum Torque pr edicted and Recom mended s ecuring bolt fo r inlet por t flange .
STP-H600/H1000 Ser ies Instruction Manual FIGURES Figure 2.1 Exam ple of Li fting the ST P Pum p ......................................................................... 2-1 Figure 3.1 Configuration of the STP Pum p ..................................
STP-H600/H1000 Series Instruction Manual 1 Precautions for Safe Operation of the STP Pump 1.1 Usable Gases Chlorine or fluorine system gases can be used in chemical specific pumps (STP- H600C/H1000C or other models). When you use gases including alkaline metals, but excluding Li, gases including Ga, Hg, In, or Sn, or HBr, contact Seiko Seiki.
STP-H600/H1000 Series Instruction Manual 1.3 Inspection Precautions Perform inspections of the STP pump and the S TP control unit (check of the air cooling fan and reset of the "BATTERY NG" .
STP-H600/H1000 Series Instruction Manual (3) Heavy Product Caution Label This label is affixed to the product with a mass of 20 kg or more. Follow the precautions of Section 2, "Unpacking " so as not to cause any accident during handling. (4) STP Pump Installation Warning Label This label describes installation of the STP pump.
STP-H600/H1000 Series Instruction Manual (6) Connector Caution Label ◇ This label describes lock of the connector. ◇ This label instructs operators to prevent th e connectors from being disconnected while the STP pump is in operation.
STP-H600/H1000 Series Instruction Manual (9) Battery Instruction Label This label instructs operators to replace batteries once a year. The next replacement date of batteries is specified upon delivery of the STP pump. Record the next replacement date (after one year ) of batteries in the blank of the label when replacing them.
STP-H600/H1000 Series Instruction Manual (12) Hot Surface Warning Label This label instructs operators so as not to touch the hot surface of the STP pump. The use of the baking heater (optional acce ssory) may lead to a considerable rise in temperatures outside the STP pump.
STP-H600/H1000 Ser ies Instruction Manual 2 Unpacking 2.1 Unpacking the STP Pump Check the following bef ore unpacking t he S TP pum p. 1) Check the package for bruises, breakage, wetness, etc. If there is any abnormality/error or it is judg ed necessary to return the product, contact Seiko Se iki.
STP-H600/H1000 Ser ies Instruction Manual 2.2 Unpacking the STP Control Unit Check the following bef ore unpacking t he S TP control unit . 1) Check the package for bruises, breakage, wetness, etc. If there is any abnormality/error or it is judg ed necessary to return the product, contact Seiko Se iki.
STP-H600/H1000 Ser ies Instruction Manual 3 Installation of the STP pump 3.1 Name and Function of Each Part (1) Inlet Po rt Flange (ICF *1 , VG *2 , ASA , ISO, etc.
STP-H600/H1000 Ser ies Instruction Manual ( 1 ) I nl et Port Flange ( 2 ) Outl et Por t F lange ( 6 ) Cool i ng Wate r Por t ( 6 ) Cooli ng Water Por t ( 3 ) STP Connec t or ( 4 ) Motor Connector ( 5 )P u r g eP o r t ( 7 )E m e r g e n c yV e n t . Val ve ( 8 ) Ground Terminal Opti onal Accessory ( 9 ) Temper at ur e Se nsor Connec t or Figure 3.
STP-H600/H1000 Ser ies Instruction Manual 3.2 Precautions Before Installation 3.2.1 Operating Environment C A U TI O N ◇ Chlorine or fluorine system gases can be used in chemical specific pumps (type C). W hen you use gases including alka line metals, but excluding Li, gases including Ga, Hg, Sn, or HBr, cont act Seiko Inst ruments.
STP-H600/H1000 Ser ies Instruction Manual 3.2.2 Inst allation Area Leave enough space for the following in additi on to that for the STP p ump: · Space for maintenance and inspection · Space for connecting cables ◇ The minimum bending radius of the STP connection cable is 150 mm (see Figure 16.
STP-H600/H1000 Ser ies Instruction Manual 3.3 How to I nst all t he STP Pump Install the ST P pump to the vacu um equipment as shown in Figure 3.2. The STP pump can be ins t al led thr ough t he damper (opt i onal accesso ry) . Pow er Cable To Power Supp ly Con tr ol U ni t Leg Out le t Port Pu mp Dry Pump ,e tc .
STP-H600/H1000 Ser ies Instruction Manual NOT I CE ◇ The STP pump cannot be used with the outlet port open t o at mospheric air. Always use t he auxiliar y pump (dry pump or similar one) . ◇ Use an auxiliary pump w it h a pumpi ng speed of 240 L/min or mor e .
STP-H600/H1000 Ser ies Instruction Manual 3.3.2 STP Pump Installation Posit ions The STP pump can be installed vert ically , horizontally, upside- down and slanted.
STP-H600/H1000 Ser ies Instruction Manual 3.3.3 How to Secure t he STP Pump ◇ The STP pump is provided with a high-speed rotor. The worst-case failure may result in a jump in rotational torque leading t o personal in jury or peripheral equipment damage.
STP-H600/H1000 Ser ies Instruction Manual 1) When securing the inlet port with bolts Refer to Table 3.2 for torque in pump abn ormality and recommended securing bolts. Secure the inlet port f lange w it h all of t he bolt holes of t he size specif ied in t he Inlet Port Flange Standard.
STP-H600/H1000 Ser ies Instruction Manual 2) When securing the inlet po rt fl ange with cl aw clamps Refer to Table 3.2 for rotational torque. When securing the inlet po rt fl ange with on ly the claw clam p, the vacuum equipment can not withstand th e maximum rotational torqu e generated by the worst-case fa ilure.
STP-H600/H1000 Ser ies Instruction Manual 3) When installing the damper in the inlet port f lang e Refer to Table 3.2 for rotational torque. In case o f using a d amper, secu re the base wi th all 8 scre w-holes for l egs or all 8 attached legs. Fol low “CAU TION” on p age 3-8 about legs and bolts for securing the base.
STP-H600/H1000 Ser ies Instruction Manual 3.3.4 Vacuum Piping ◇ DO NOT open the STP pump through t he flange to at mospheric air while t he STP pump is running.
STP-H600/H1000 Ser ies Instruction Manual (1) Piping at t he Inlet Port Flang e Attach the in let port to the hi gh vacuum sid e. Maximum working pressure (Pressure at the inlet port flange applicable continuously) l 67 Pa [0.5 Torr] (for water cooled) l 5.
STP-H600/H1000 Ser ies Instruction Manual 3.3.5 Connecting the Emergency Vent . Valve The emergency vent. valve stops the S TP pump by introducing g ases if any abnormality/error occurs in the STP pump. Connect the emergency vent. valve (contain ed in the attached accessories) to the purge port as shown in Figure 3.
STP-H600/H1000 Ser ies Instruction Manual Emergenc y Vent . Va lve Filter S id e Pur ge Por t KF10 Dry N 2 Gas or Ot he r Dry N 2 Gas o r O th e r Figure 3.
STP-H600/H1000 Ser ies Instruction Manual 4 Installation of the STP Control Unit 4.1 Name and Function of Each Part 4.1.1 Front Panel (1) "PO W ER O N/OFF" Sw itch (illuminated alt ernat e push but t o n sw it ch, green LED) l Press thi s switch to p ower ON/OFF th e STP pu mp (MANUA L opera tion only).
STP-H600/H1000 Ser ies Instruction Manual (8) " O VER TEMPERATURE" Lamp ( r e d LED ) l Lights whe n any of the fol lowing ab normaliti es occurs: a) When the motor or electromagnet overheats (110 ℃ or higher). b) When the STP connection cable is not connected.
STP-H600/H1000 Ser ies Instruction Manual (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (11) (12) Figure 4.1 STP Control Unit Front Panel 4-3.
STP-H600/H1000 Ser ies Instruction Manual 4.1.2 Rear Panel C A U TI O N ◇ A hazardous liv e v oltage may exist at connect or/ t erminal that marked . DO NOT touch t he t erminal. Doing so may result in electr ic shock. W hen operating connection/disconnection to terminal, alway s power OFF the STP pump (Switch the breaker "OFF").
STP-H600/H1000 Ser ies Instruction Manual (22) START/STOP TB6 Terminal Block A maximum voltage : E qual to the in put voltage of this termi nal block. (MAX 250VAC) l For remote control. For details concerning remote control terminal blocks (19) to (22), see Section 8, "Remote Input/Output Si gnal Terminal B locks.
STP-H600/H1000 Ser ies Instruction Manual 4.1.3 Inside of the STP Cont rol Unit (25) Inverter l This is a three-p hase transis tor-inverter which starts/s tops the STP p ump.
STP-H600/H1000 Ser ies Instruction Manual (25) (26) (30) (27) (28) (29) (30) (31) (32) Figure 4.3 Inside of the STP Cont rol Unit 4-7.
STP-H600/H1000 Ser ies Instruction Manual 4.2 Precautions Before Installation 4.2.1 Operating Environment Install the STP control unit in a place meet ing t he f ollow ing requirements: Ambient Temperature 0 ℃ to 40 ℃ Ambient Relat iv e Humidi ty 30 to 95% (no dew condensing) Environmen t l A place free of exposure to direct sunlight.
STP-H600/H1000 Ser ies Instruction Manual 4.2.2 Inst allation Area Leave enough space for the following in a dditi on to that for the STP control unit. · Space for maintenance and inspection · Space for inlet and outl et of air for cooling - Top and side: 5 cm or more - Bottom: 2.
STP-H600/H1000 Ser ies Instruction Manual 4.3 Attaching the STP Cont rol Unit Front Panel to a Rack The dimensions of the S TP control unit f ront pa nel conform to JIS. Therefore, this panel can be attached to any typ e of commercially-available racks.
STP-H600/H1000 Ser ies Instruction Manual 4.4 Cable Connection 4.4.1 Name and Dimensions of Each Cable φ 40 STP Co n t r o l U n i t S i d e STP P u m p S i d e φ 30 φ 30 STP Connect ion Cab le Moto r Connect ion Cabl e Ground Cab le E merg ency V ent.
STP-H600/H1000 Ser ies Instruction Manual Y(N [L2] ) blue G(GN D [ ] ) yel low/ green X(L[ L1] ) bro wn 9.8 9.8 φ 54 72. 3 Power Cabl e Crimp-Typ e Terminal Lug (M4 *1 ) 2.
STP-H600/H1000 Ser ies Instruction Manual 4.4.2 How to Connect t he Cables C A U TI O N ◇ W hen connecting/disconnecting cables, alway s pow er OFF the STP pump (switch the breaker "OFF"). Failure to do so may result in elect ric shock or product damage.
STP-H600/H1000 Ser ies Instruction Manual 2) Connecting the STP Connect ion Cable Connect the socket side of the STP conne ction cable to the STP connector of the STP pu mp and connect the p in sid e to "P.CON NECT OR CON5A " of the STP control unit.
STP-H600/H1000 Ser ies Instruction Manual 5) Connecting Primary Pow e r (Primary Side) Cable Connect pow er cable to t h e " AC POWER TB1 " on the STP control unit rear panel as shown in Table 4.1. Table 4.1 Connecting Primary Power Cable TB1 Pin No.
STP-H600/H1000 Ser ies Instruction Manual TB1 Mag n i f i ed Primary P ower C able C ab le Fitti n g To ol Gr ound Cab le fo r Cove r TB1 Cov er part : Secur e us ing a t ta ched scr ews Figure 4.
STP-H600/H1000 Ser ies Instruction Manual 5 How to Start/Stop the STP Pump C A U TI O N ◇ NEVER connect or disconnect any cables while the power is O N. ◇ NEVER turn the pr imar y power OFF ( switch the br eaker "O FF" ) w hile the STP pump is in rotation.
STP-H600/H1000 Ser ies Instruction Manual 5.3 Start Procedures Start the auxiliary pum p befo re or sim ultaneously w it h st art of t he S TP pum p. Open the vacuum valv e locate d at the out let port f lang e side af t er st art ing t he aux iliary pump.
STP-H600/H1000 Ser ies Instruction Manual There are two methods of oper ating the STP pump: MANUAL and REMOTE. Select one which fits y our vacuum equipment. 5.5 Manual Operation Slide the "MANUAL/REMOTE" changeover sw itch on the rear pa nel to "MANUA L.
STP-H600/H1000 Ser ies Instruction Manual 5.5.5 Powering OFF 1) When all of t he " ACCELERATIO N," "NO RMAL OPERATION" and " BRAK E" lamps are off: Press the "POWER ON/OFF" swi tch. The swi tch pops up into the unloc ked position, the magnetic bearing stops, and th e rotor lands (POWER OFF state).
STP-H600/H1000 Ser ies Instruction Manual 5.6 Remote Operation Slide the "MANUAL/REMOTE" changeover switch on the STP control unit rear panel t o "REMO TE." 5.6.1 Powering ON Switch ON the breaker on the STP control unit rear panel, (to prevent incorrect operation, a metal fitti ng is attached to the breaker.
STP-H600/H1000 Ser ies Instruction Manual 5.6.4 Powering OFF When all thr e e ( "ACCELERATION", " NORMAL OPERATIO N" and " BRAKE") lamps are off, switch the breaker OFF on the rear panel. The magnetic bearing stops, and the rotor lands.
STP-H600/H1000 Ser ies Instruction Manual 6 Safety Functions When an Abnormality /Error Occurs The STP pump is provided wi th safety func ti ons for various abnormalities/errors (See Tables 6.3 and 6.4, "Safety Functions"). For troubleshooting, see Section 6.
STP-H600/H1000 Ser ies Instruction Manual <Operation after a Power Recovery> 1) MANUAL Operation The STP pump continues decelerating even after a p ower recovery.
STP-H600/H1000 Ser ies Instruction Manual 6.1.2 Abnormal State of Magnetic Bearing When the magnetic bearing does not function normally due to a breakage of the STP connection cable, disconnection of co nnectors or any abnormality/ error of the STP control circuit, the rotor falls on the tou ch down bearin g.
STP-H600/H1000 Ser ies Instruction Manual 6.1.8 Abnormal Battery Volt age When battery capacity became l ess than operating limit value or there was connection mi stake, there may be the thing th at battery abnormality is detected .
STP-H600/H1000 Ser ies Instruction Manual 6.2 Restarting after Any Safety Funct ion Operates 1) In cas e of a power fai lure: E stablish a sequen ce so that power can be su pplied to th e STP control unit i mmediately after a power recovery.
STP-H600/H1000 Ser ies Instruction Manual 3) Other Cases After the STP p ump stops th oroughly, po wer OF F, switch th e breaker "OFF" and remove the cause of the abnormality/error. Then, restart the STP pump and check if it operates correctly.
STP-H600/H1000 Ser ies Instruction Manual 6.3 Operation of the Emergency Vent . Valv e The emergency vent. valve is opened imme diately after an abnormality/error in the magnetic bearing, excessive vibration or any other abnormality/error is found. Gases (dry N 2 gases or other) are introduced through the emergency vent.
STP-H600/H1000 Seri es Instruction Manual Table 6.3 Safety Funct ions [E.V. used herein is the abbrev iation for Emergency Vent.] Abnormality /Error Operation state of safety functions Lamp indication.
STP-H600/H1000 Seri es Instruction Manual Abnormality /Error Operation state of safety functions Lamp indication REM OTE output signal State of the STP pump Probable causes of an abnormality/error Ove.
STP-H600/H1000 Ser ies Instruction Manual 7 Gas Suction, Cooling and Baking the STP Pump 7.1 Gas Suction WA RNIN G ◇ W hen sucking gases, they may remain in the STP pump. Intr oduce a purge gas and then exhaust all gasses. Residual gases in the STP pump may cause an accident when t he STP pump is removed.
STP-H600/H1000 Ser ies Instruction Manual 7.2 Cooling the STP Pump There are two methods for cooling: Water cooling and Air cooling. When sucking gases, cool the STP pump in a ccordance with the oper ating p ressure range. Also , when pe rforming bak ing, always cool the ST P pump .
STP-H600/H1000 Ser ies Instruction Manual 7.2.2 Air Cooling Method When water cooling is not av ailable, an air cooling unit ( opt ional accessory) can be used . Foll ow the step s belo w: 1) Remove the water cool ing unit (it i s attached with the fou r M8 *1 screws).
STP-H600/H1000 Ser ies Instruction Manual 7.3 Baking the STP Pump To attain a lower p ressure in a sh orter time and red uce the exhaust time, bake th e vacuum equipment and S TP pum p. WA RNIN G ◇ The surfaces of the STP pump and its peripheral equi pment w ill become extremely hot w hen per for ming baking.
STP-H600/H1000 Ser ies Instruction Manual Baki ng Heater C oo lin g W a ter P ort Cooli ng Water Po rt Wa t e r Co o l i n g Un i t (St and ar d Acces sor y ): Used when w ate r coo led A ir C oo lin g Un it (Opti onal Accesso ry) : Used wh en ai r co ol ed Thi s l abel i s att ached to t he baki ng heater .
STP-H600/H1000 Ser ies Instruction Manual 7.3.2 Interlocking the STP Pump Operation w ith Baking Follow the steps below to interlock the STP pump operation with baking (read through Section 8, " Remote Input/Ou tput Signal T erminal Blocks ," then start operation).
STP-H600/H1000 Ser ies Instruction Manual 8 Remo te Input/Output Signal Terminal Blocks 8.1 I/O T B2 Term inal Block This is a terminal block for a re mote output s ignal. Use it i n accordance with Table 8.1 and Figure 8.1. The terminal block function s in both the MANUAL and REMO TE operations.
STP-H600/H1000 Ser ies Instruction Manual Terminal Description (6) (5) N . O OUT FAN Terminal for connecting the air cooling unit. The voltage input to AC. PO WER termi nal ((19)-(20)) is output to thi s terminal when th e STP pump is in acceleration or rated operation.
STP-H600/H1000 Ser ies Instruction Manual I/ O T B 2 : R e m ote O utput Sign al Te rm inal Bloc k 19 20 1 2 3 4 5 6 7 8 9 10 N. O :N orm al Ope n N.C :N orm al Clos e COM :Co m mon HEATER N .
STP-H600/H1000 Ser ies Instruction Manual Table 8.2 shows rated contacts for relays CR1 to 4, CR7, and CR10 (S ee Figure 8.1) and CR8 (See Figure 8.4). Table 8.2 Rated Contact s for Relay s CR1 to 4, CR7, CR8 and CR10 Resistance Load (cos φ =1) Induction Load (cos φ =0.
STP-H600/H1000 Ser ies Instruction Manual 3 4 R.P UM P NO. OUT AC Pow e r Rel ay R.P R.P : Auxi l i ary Pum p Figure 8.2 Exampl e of Connecting I/O TB2 R.
STP-H600/H1000 Ser ies Instruction Manual 8.2 D C I/O TB3 T ermin al Bl ock This is a terminal block for a remote inp ut/outp ut s ignal. Us e it in accord ance with T able 8.4 and Figure 8.4. Term inals excluding the HE ATING terminal function in either case of the REMOTE/MANUAL operation.
STP-H600/H1000 Ser ies Instruction Manual DC I / O TB 3 : 1 3 N.O : Norm al Open N.C : N orm al Close IN : Inpu t Terminal O UT : O utput T er min al A uxili ar y p u m p ther m al switch input t ermina l Rota ti on i nhib i t si gnal input t ermina l Baking hea ter con tro l si gnal inpu t te rminal E mergency ven t .
STP-H600/H1000 Ser ies Instruction Manual 8.3 START STOP TB5 Terminal Block This is a terminal block for a contact type remo te input signal. Use it in accordance w it h Table 8.5 and Figure 8.5 (See Se ction 5. 6. 2, "Starting/Stopping th e STP Pump").
STP-H600/H1000 Ser ies Instruction Manual 8.4 START/STOP TB6 Terminal Block This is a terminal block for a volt age type remote inp ut signal. Use it in accordance with Tabl e 8.6 and Figure 8.6 (S ee S ection 5. 6. 2, “S tarting/ S t opping the STP Pump") .
STP-H600/H1000 Ser ies Instruction Manual 9 Internal Battery Four batteri es (PORTA LAC Series Small-Size d Sealed Lead-Acid Ba tteries, PE12V 2WS : 12V, 2Ah, manufactured by Japan Storage Battery Co., Ltd.) (hereinafter referred to as the internal battery) are in serted into the ST P pu mp for backup d uring a power failure.
STP-H600/H1000 Ser ies Instruction Manual 10 5 4 3 2 1 0.5 10 20 30 40 Am b ient Te mperatures( ℃ ) Li fe of the Interna l Batte ry (Year) 40 5 2 Allow able S helf Life of th e Int ernal Battery (M ont h) 50 20 30 10 10 20 30 40 Am b ient Te mperatures( ℃ ) Figure 9.
STP-H600/H1000 Ser ies Instruction Manual 9.4 BATTERY NG Lamp If battery capacity became les s than operatin g limit value or there was connection mistake, the "BAT TERY NG" lamp on the rear side of the STP control un it front panel (See 9.
STP-H600/H1000 Ser ies Instruction Manual 9.5 How to Replace the I nt ernal Bat t e ry WA RNIN G ◇ W hen covering the battery case, be sure not to catch the bat t ery cable in the battery case. Failure to do so may shortcircuit the battery and result in a leakage, production of fire or explosion.
STP-H600/H1000 Ser ies Instruction Manual 9.5.2 How to Replace t he Bat t ery in the Battery Case 1) Remove front plate (5 ) from battery case (4) b y unscrewing 4 M2 screws.
STP-H600/H1000 Ser ies Instruction Manual (1) STP Control Unit Front Panel (2) Internal Battery C onnector (3) Ba ttery Case Screw (4) Battery Case (5) Ba ttery Case Front P late (6) Battery Internal .
STP-H600/H1000 Ser ies Instruction Manual 9.6 How to Dispose of the Int ernal Bat t ery Dispose of or collect worn-out batteries in a ccordance with the guid elines given by each national an d/or local government. If you proc ure batteries, dispose of them in accordance with the gui delines given by the battery manufacturer.
STP-H600/H1000 Ser ies Instruction Manual 10 External Battery C A U TI O N ◇ DO NOT use (an) external bat t eries w hen internal batteries are inserted. Failure to do so may result in product damage or a problem. It could cause a problem, such as product damage.
STP-H600/H1000 Ser ies Instruction Manual 10.2 Installat ion of the Ext ernal Bat t ery C A U TI O N ◇ Turn OFF the primary power (Sw itch t he breaker "OFF"), before connecting the battery. Failure to do so may result in product damage or a problem due to electr ic shock or short-circuiting of the internal circuit.
STP-H600/H1000 Ser ies Instruction Manual 10.3 How to Charge t he Ext ernal Bat t ery NOT I CE ◇ The battery is charged w hile t he pow er is "ON," regardless of the operation state of the STP pump. The STP control unit is equipped w ith a const ant v o lt ag e ( 55 V) circuit and a const ant current (0.
STP-H600/H1000 Ser ies Instruction Manual 11 Operation Principle of the STP Pump The STP-H600/H1000 is a series of magnetically -levitated turbomolecul ar pumps, featuring the foll owing: l Oil fr ee .
STP-H600/H1000 Ser ies Instruction Manual ( 7 ) Tou ch down bea ri ng ( 8 ) Touch dow n beari ng ( 1 ) Rotor blade ( 2 )S t a t o rb l a d e ( 4 ) Radi a l e l ec t romagnet ( 3 ) Radia l sensor ( 3 ) Radial senso r ( 4 ) R adia l electro ma gn et ( 6 ) Axia l el ect rom agnet ( 6 ) Axia l el ect rom agnet ( 5 ) Axial sens or Figure 11.
STP-H600/H1000 Ser ies Instruction Manual 12 Maintenance and Inspection C A U TI O N ◇ Stop the STP pump, turn O FF t he primar y power (switch the breaker "OFF") and disconnect the internal batt ery connector before performing maintenance of the STP control unit (batt ery replacement/fuse replacement).
STP-H600/H1000 Ser ies Instruction Manual 12.3 Replacing the Fuses C A U TI O N ◇ Remove the probable causes of the blown fuse (Ex. a problem with t he remote input signal, etc. ) befor e replacing the fuse. ◇ Always use specified and rated fuses.
STP-H600/H1000 Ser ies Instruction Manual 12.4 Inspecting for Deposit ◇ W hen inspecting for deposit, exhaust gases inside the STP pump thoroughly. Residual gases may cause an accident when remov ing the STP pump. Confirm the characteristics of gas to be used, referring to the Material Safety Data Sheet (MSDS) y ou obt ain from the gas supplier.
STP-H600/H1000 Ser ies Instruction Manual 12.5 Overhaul The recommended maintenance intervals for different process app lications are tabul ated belo w: Process Period Remarks Metal Etch 1 year Ensure that TMS (Temperature Management System) is fitted and operational to prevent accumulation of by-product dep osition in the pump.
STP-H600/H1000 Ser ies Instruction Manual 12.6 Transporting for Repair or Overhaul ◇ W hen removing the STP pump from the vacuum equipment, exhaust gases inside the STP pump thoroughly. Residual gases may result in an accident w hen remov ing t he STP pump.
STP-H600/H1000 Ser ies Instruction Manual 13 Storage 13.1 The STP Pump When the STP pump is left unused ov er t he specif ied period ( m ore t han a f ew m o nt hs) , follow the precautions below: 1) Close the inlet port of the STP pump and vacuum it using an aux iliary pum p.
STP-H600/H1000 Ser ies Instruction Manual 13.2 The STP Control Unit If the STP control unit ( including cables) is not used f o r a long period ( m ore t han a fe w months), foll ow the precautions below: 1) Remove the in ternal battery from the STP control unit (see Section 9, "In ternal Battery").
STP-H600/H1000 Ser ies Instruction Manual 14 Disposal 14.1 The STP Pump Dispose of the STP pump as industrial waste according to the guid elines given by each national and/or local government. WA RNIN G ◇ W hen disposing of the STP pump, exhaust gases inside the STP pump thoroughly.
STP-H600/H1000 Ser ies Instruction Manual 14.3 The Battery Dispose of or collect worn-out batteries in a ccordance with the guid elines given by each national an d/or local government. If you proc ure batteries, dispose of them in accordance with the gui delines given by the battery manufacturer.
STP-H600/H1000 Ser ies Instruction Manual 15 Troubleshooting If an abn ormality/error i s found when usi ng the STP p ump, check i t and take mea sures in accordan ce with the fol lowing pro cedures.
STP-H600/H1000 Ser ies Instruction Manual 2) In case the FREE RUN state is not reset af t er t roubleshooting: i. Check the tachometer on the front panel. ii. If the needle is in the red, it m eans t he S TP pump has stopped. Power OFF and swit ch t he break er " O FF.
STP-H600/H1000 Ser ies Instruction Manual 15.3 Abnormalities W hen Performing The STP Pump Start Operation (When any "Abnormalit y / Error W a rning " lam p lig hts, see Section 15.5 "W hen Any Abnormality/Error Warn ing Lamp Lights.") Table 15.
STP-H600/H1000 Ser ies Instruction Manual No. Symptom Probable Causes Countermeasures Referred Section (1) Baking temperature overheat. Set the temperature to 120 ℃ or lo wer. 7.3 (2) Insuffi cient cooling. Al ways coo l durin g baking or gas suction.
STP-H600/H1000 Ser ies Instruction Manual 15.5 W hen Any Abnormality/ Error Warning Lam p Lights When any Abnormality / Error W arning lam p light s, check which lamp is being lit and see Table 15.5 for which procedure No. to follow. Then, follow the steps of that procedure No.
STP-H600/H1000 Ser ies Instruction Manual Table 15.5 Troubleshooting W hen Any of Abnormality/Error Warning Lam p Lights PROCEDU RE No. Lamp Being Lit Probable Causes Countermeasures Referred Section No.1 “OVER TEMPERATURE” “FAILURE” “EMERGENCY OPERATION” (1) Incorrect connection of the STP connection cable.
STP-H600/H1000 Ser ies Instruction Manual PROCEDU RE No. Lamp Being Lit Probable Causes Countermeasures Referred Section No.4 “FAILURE” (3) Overheating ins ide the STP cont rol unit: 1) Ambient te mperature. 2) Insuffici ent cooling of the STP control unit.
STP-H600/H1000 Ser ies Instruction Manual PROCEDU RE No. Lamp Being Lit Probable Causes Countermeasures Referred Section No.6 “FAILURE” “BATTERY NG” (inside the fr ont panel) ( “EMERGENCY OPERATION” l am p may light) (1) Insuffici ent charge or deteriorat ion of the battery.
STP-H600/H1000 Ser ies Instruction Manual 16 Specifications and Accessories 16.1 Specifications for the STP Pump Table 16.1 Specifications for the STP Pump Item STP-H600 STP-H1000 Inlet port flange IC.
STP-H600/H1000 Ser ies Instruction Manual 16.2 16.2 Specifications for the STP Cont rol Unit Table 16.2 Specifications for the STP Control Unit Item Specifications Input voltag e V AC 200 to 240 ± 10% At start: kVA 2.6 Input power Under rated operation: kVA 1.
STP-H600/H1000 Ser ies Instruction Manual Item Specifications Input/outp ut terminal · AC POWER TB1 (3 pins) · P.CONNECTO R CO N5A ( 45 pins) · INVERTER OUTPUT CON2A ( 5 pins) · LEAK VALVE CON8A ( 8 pins) · I/O TB2 (20 pins) · DC I/O T B3 (10 p ins) · STAR T STOP T B5 (3 pi ns) · START/S TO P TB6 (2 pins) · EXT.
STP-H600/H1000 Ser ies Instruction Manual 16.3 Accessories Table 16.3 Accessories Item Q'ty Remarks STP control unit 1 Primary power cable * 1 1 STP connection cable * 1 1 Motor connection cable .
STP-H600/H1000 Ser ies Instruction Manual φ 180 Outl et port f lange KF *1 40 Cooling water port P T *1 (R C) 1/ 4 In let por t f lange F rom v iew in g ar row B φ 203 3 0 ゚ 3 0 ゚ 4 5 ゚ 2 5 ゚ 1 5 ゚ 1 5 ゚ 3 5 ゚ 147. 5 141. 5 60 φ 2 1 0 30 30 85 φ 208 φ 245 35 50 13 39 80 1 φB D 26 C A B Mi n.
STP-H600/H1000 Ser ies Instruction Manual 430 6 10 62 356 62 24.5 50 50 50 24.5 199 543 30 470 3 500 (150) 5 188.6 37 356 37 25 430 25 480 40 34.5 130 34.5 24 35 400 35 30 5.4 416 32 32 480 Ve nti lation port Un i t : m m Ve nti lation port Ve nti lation port Vent il ati on port Vent il ati on port F igu re 16 .
STP-H600/H1000 Ser ies Instruction Manual Figur e 16.3 Label Af f ix ing Pos i t i ons for t he STP Pum p ・ CAUTION 非常用電磁バルブ 取付位置 ポンプ使用前に必ず 取付けてください。 E merge ncy val ve installation position Co nne ct the e mer g- ency ventin g valve b efore u se .
STP-H600/H1000 Ser ies Instruction Manual ・注意 ・ CAUTI ON ◇バッテリーは1年毎に交換し てく ださい。 ◇内部バッテリーと外部バッテ リー を同時に使用しないでくださ い。 ◇ Change batter ies every year .
STP-H600/H1000 Ser ies Instruction Manual A IR COO L I NG UNI T VOL TS A C V SEI K O SEI K I MADE IN JAPAN Baking H eater Air Co ol ing Unit Fi gure 16.5 Label Af f ix i ng Posi t ions f or the Spe c ia l Accessory ・警告 高温部 やけどします。 触らないでく ださい 。 ・ WARN I N G Hot s ur fac e .
STP PUMP PROBLEM CHECK SHEET Contact your nearest Seiko Seiki ’s office shown in the rear cov er. To : Com pany Name : D a t e : C o n t a c t N a m e : T E L . N u m b e r : F A X . N u m b e r : A d d r e s s : F r o m : C u s t o m e r N a m e : D a t e : P e r s o n i n c h a r g e : T E L .
UNIT CONVER SION TABLE Length m cm mm i nc h 1 100 1.00x10 3 39.4 0.01 1 10.0 0.394 1x10 -3 0.10 1 39.4x10 -3 25.4x10 -3 2.54 25.4 1 Mass g kg lb. 1 1.00x 10 -3 2.20x10 -5 1x10 3 1 2.20 454 0.454 1 Pressure Pa Torr kgf /cm 2 1 7.50x 10 -3 1.02x10 -5 133 1 1.
Sales Office (Japan) Seiko Instruments Inc. Vacuum Innov at iv e Products Sales Department 1-8 Nakase, Mihama-ku, Chiba-shi, Chiba 261-8507 JAPAN Telephone: <Vacuum Innovat iv e Products Sales Depa.
Een belangrijk punt na aankoop van elk apparaat Seiko Instruments MT-17E-003-D (of zelfs voordat je het koopt) is om de handleiding te lezen. Dit moeten wij doen vanwege een paar simpele redenen:
Als u nog geen Seiko Instruments MT-17E-003-D heb gekocht dan nu is een goed moment om kennis te maken met de basisgegevens van het product. Eerst kijk dan naar de eerste pagina\'s van de handleiding, die je hierboven vindt. Je moet daar de belangrijkste technische gegevens Seiko Instruments MT-17E-003-D vinden. Op dit manier kan je controleren of het apparaat aan jouw behoeften voldoet. Op de volgende pagina's van de handleiding Seiko Instruments MT-17E-003-D leer je over alle kenmerken van het product en krijg je informatie over de werking. De informatie die je over Seiko Instruments MT-17E-003-D krijgt, zal je zeker helpen om een besluit over de aankoop te nemen.
In een situatie waarin je al een beziter van Seiko Instruments MT-17E-003-D bent, maar toch heb je de instructies niet gelezen, moet je het doen voor de hierboven beschreven redenen. Je zult dan weten of je goed de alle beschikbare functies heb gebruikt, en of je fouten heb gemaakt die het leven van de Seiko Instruments MT-17E-003-D kunnen verkorten.
Maar de belangrijkste taak van de handleiding is om de gebruiker bij het oplossen van problemen te helpen met Seiko Instruments MT-17E-003-D . Bijna altijd, zal je daar het vinden Troubleshooting met de meest voorkomende storingen en defecten #MANUAl# samen met de instructies over hun opplosinge. Zelfs als je zelf niet kan om het probleem op te lossen, zal de instructie je de weg wijzen naar verdere andere procedure, bijv. door contact met de klantenservice of het dichtstbijzijnde servicecentrum.